Headway Research, Inc. produces a line of spin coaters,
spin developers for photoresist imaging and spin cleaners.
Headway's spinners, associated dispensers and accessories
are commonly used for R&D and specialty production use.
Headway's spinners rotate an object (substrate), and use the centrifugal force to spread a liquid across the surface.
cleaning a substrate surface
conditioning the surface for following processes
coating the surface with a thin uniform film
developing micro images in exposed photosensitive coatings
The core of Headway's product line is our standard and customized spinners & developers.
The basic spinners may have added accessories for:
ease of use
consistency of process
Fluid Dispensers - for programmed sequential application of fluids
Moving Dispense Arms - to carry dispense lines from a parked home position to a moving or stationary dispense point
Substrate/lift/centering mechanisms - for conveniently loading and unloading the substrate onto the spinner chuck
Headway can special design or modify our spinners to accommodate your process requirements.
Our Accessories page offers solutions to expand a spinner's capabilities or to add convenience in a typical spinning environment.
PWM32 Spinner Family
IT22 Spinner / Developer
Refurbished / Demo Units
R&D Spinner for 200 mm & 300 mm wafers
MV4000 Vapor Cleaner
PS80 Manual Spin Cleaner
CONTROLLERS (SPINNER SYSTEM CONTROLLERS)
SPIN COATER / DEVELOPER MOTORS
FOR PHOTORESIST AND OTHER HI-PURITY FLUIDS
CB15 Powered Lid Option
Fume / Vapor Extraction System
Mounting Options for Spinners and Controllers
Moving Arm for Dispensing Fluids
Substrate Alignment Fixture
INHIBITED DRYING SPIN COATING