Headway Research, Inc. produces a line of spin coaters, 
spin developers for photoresist imaging and spin cleaners.  

Headway's spinners, associated dispensers and accessories
are commonly used for R&D and specialty production use.

 Headway's spinners rotate an object (substrate), and use the centrifugal force to spread a liquid across the surface. 
   

Uses include:
 

  • cleaning a substrate surface

  • conditioning the surface for following processes

  • coating the surface with a thin uniform film

  • developing micro images in exposed photosensitive coatings

 The core of Headway's product line is our standard and customized spinners & developers.

 The basic spinners may have added accessories for:

  • ease of use

  • consistency of process

  • higher productivity

   
  Headway can special design or modify our spinners to accommodate your process requirements. 
   Our Accessories page offers solutions to expand a spinner's capabilities or to add convenience in a typical spinning environment.


Product Line:

SPINNER SYSTEMS

 
 PWM32 Spinner Family
 IT22 Spinner / Developer
 Refurbished / Demo Units
 R&D Spinner for 200 mm & 300 mm wafers
 MV4000 Vapor Cleaner
 PS80 Manual Spin Cleaner

 

CONTROLLERS (SPINNER SYSTEM CONTROLLERS)

 
 PWM32
 PWM202
 MP100

 

 SPIN COATER / DEVELOPER MOTORS

 
 BD2 and BD5 Motor
 PS Motor

 

  FLUID DISPENSER

 FOR PHOTORESIST AND OTHER HI-PURITY FLUIDS

 HDP98


 

  CHUCKS 


 EC-Type Chucks

 LS-Type Chucks
 PS80-Type Chucks

 

  ACCESSORIES


 CB15 Powered Lid Option
 Fume / Vapor Extraction System
 Mounting Options for Spinners and Controllers
 Moving Arm for Dispensing Fluids
 Substrate Alignment Fixture
 Substrate Lifter
 Vacuum Sources
 Waste Containers
 

 INHIBITED DRYING SPIN COATING






 

© 2016 by Segen Service Tech. Proudly created with Wix.com